Semiconductor Machine Explosion & Fire – Asia

A crystal puller, used in the initial phase of semiconductor (silicon chip) manufacturing, experienced a sudden internal explosion during operation, resulting in a fire and complete facility shutdown. Envista Forensics was retained by insurers to determine the root cause, assess the extent of damage to the equipment, and evaluate the proposed repair scope and costs.

Envista's Investigation

Envista engineers collaborated closely with the original equipment manufacturer to safely dismantle the affected crystal puller. Through forensic analysis, we identified that molten silicon had leaked from the furnace crucible and reacted with the stainless-steel cooling structure. This reaction, known as liquid metal embrittlement, led to a structural failure that allowed cooling water to enter the furnace. The interaction of water with the high-temperature environment caused a steam explosion, which forced open a furnace door and ignited combustible materials nearby.

Our team conducted witness interviews, analyzed CCTV footage, and reviewed the system’s control and alarm logs to reconstruct the sequence of events leading to the incident. We also evaluated the manufacturer’s proposed repair scope and cost estimate to ensure alignment with the damage sustained.

Outcome

Envista’s investigation confirmed the cause of the explosion as a steam event due to water ingress from the cooling system. We validated the reasonableness and cost-effectiveness of the proposed repair plan, providing insurers with confidence in the claim’s scope and ensuring the claim quantum was fair and justified.